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Cleanroom

TEVEMA's Cleanroom Technology

TEVEMA has focused heavily on the production of springs for the semiconductor industry. With our own cleanroom, we are the first European supplier of springs with a cleanroom facility. This focus has led to expertise in manufacturing technical springs without chemical residues, which is essential to the semiconductor industry.

Cleanroom from Tevema

“A cleanroom is a specially designed space in which the presence of suspended particles is strictly regulated and classified. The purpose of a cleanroom is to minimize the introduction, production, and retention of particles in the room. Our cleanroom complies with the international standard ISO 14644-1.”

Packaging

After completing the complete cleaning process, the springs undergo individual conditioning. Then these cleaned springs are carefully packed in specially designed cleanroom packaging. In addition, for grade 2 vacuum packaging, we offer the option of vacuum sealing these special packages as well, contributing to an even higher level of purity and protection during storage and transport.

AMSL GSA

TEVEMA adheres to the ASML GSA Standards. The corresponding GSA standards provided by Tevema are grade two and grade four. Tevema’s cleanroom is specially certified to supply, as a supplier, in accordance with these grades. In addition to managing airflows and air cleaning, and minimizing human contact with the product, spring cleanliness is also ensured by maintaining strict protocols for packaging and transport.

Process

The springs are routed from production to a pre-clean process and then brought into the cleanroom. At GSA Grade four, they undergo four post-treatment baths: one ultrasonic bath, two chemical baths, and one drying drum to prevent rusting. For Grade two, the springs are treated in a cleanroom oven. After the process, all springs are checked individually in a black-room for chemical residues.

Frequently Asked Questions

A cleanroom is a controlled environment in which the concentration of particles and microorganisms is closely monitored and minimized. For technical springs, a cleanroom is essential because it helps to prevent contaminants that can affect the performance and lifespan of the springs. Even small particles or dust can significantly reduce the functionality of the springs.

Our cleanroom complies with the classification according to the ISO 14644 standards, class 5, with a specific focus on minimizing airborne particles. This means that our cleanroom is designed and managed to meet strict requirements for air quality, including maximum allowable particle concentrations per cubic meter of air, airflow requirements, and filtration systems to remove contaminants.

Cleanliness Class for Selected Airborne Particles

For cleanrooms and clean zones according to ISO 14644-1:2015
ISO Classification Number Maximum Concentration Limits (particles/m³ air) for particles equal to and greater than the sizes specified below
≥0.1µm ≥0.2µm ≥0.3µm ≥0.5µm ≥1.0µm ≥5.0µm
ISO Class 1 10
ISO Class 2 100 24 10
ISO Class 3 1,000 237 102 35
ISO Class 4 10,000 2,370 1,020 352 83
ISO Class 5 100,000 23,700 10,200 3,520 832
ISO Class 6 1,000,000 237,000 102,000 35,200 8,320 293
ISO Class 7 352,000 83,200 2,930
ISO Class 8 3,520,000 832,000 29,300
ISO Class 9 35,200,000 8,320,000 293,000

To ensure the cleanliness of the springs, we follow strict procedures and protocols. This includes the use of special cleaning methods and equipment, regular inspections of both the springs and the cleanroom environment, and stringent quality control measures throughout the entire production process.

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